NEWPORT 优铂特 GM50A013103SMM020 GM50A Metal Sealed 10-50,000 sccm Mass Flow Controllers
NEWPORT 优铂特 GM50A013103SMM020 GM50A Metal Sealed 10-50,000 sccm Mass Flow Controllers
Mass Flow Controller, 1000 sccm, 0.25 in. Swagelok-style, 0-5 VDC, DB15, Metal Seal
概览
The G-Series GM50A013103SMM020 metal-sealed, digitally-controlled mass flow controller utilizes the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. It has a Full Scale Flow Range of 1000 sccm and a control range of 20 to 1000 sccm, a 15-pin D-subminiature connector with tied grounds, and a 0-5 VDC flow input/output signal. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas.
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