NEWPORT 优铂特 GM50A013101SMM020   GM50A Metal Sealed 10-50,000 sccm Mass Flow Controllers     Mass Flow Controller, 10 sccm, 0.25 in. Swagelok-style, 0-5 VDC, DB15, Metal Seal         概览   The G-Series GM50A013101SM020 metal-sealed, digitally-controlled mass flow controller has a Full Scale Flow Range of 10 sccm and a control range of 0.2 to 10 sccm, a 15-pin D-subminiature connector with tied grounds, and a 0-5 VDC flow input/output signal. It utilizes the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. Typical response times are on the order of 500 milliseconds. Digital calibration yields 1% of set point accuracy on the calibration gas.         技术参数 类型 Mass Flow Controller   校准气体 N2 (or e...