NEWPORT 优铂特 GE50A013204SMV020 GE50A Viton Sealed 10-50,000 sccm Mass Flow Controllers
NEWPORT 优铂特 GE50A013204SMV020 GE50A Viton Sealed 10-50,000 sccm Mass Flow Controllers Mass Flow Controller, 20,000 sccm, 0.25 in. Swagelok-style,0-5 VDC, DB15, Viton Seal The G-Series GE50A013204SMV020 digitally-controlled mass flow controller utilizes the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. It has a Full Scale Flow Range of 20,000 sccm and a control range of 400 to 20,000 sccm, a 15-pin D-subminature connector with tied grounds, and a 0-5 VDC flow input/output signal. 参数 类型 Mass Flow Controller 校准气体 N2 (or equivalent) 满量程流量范围 20000 sccm 最大入口压力 150 psig 正常工作压差 150 psig 验证压力 1000 psig 爆破压力 1500 psig &nb...
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GE50A013204SMV020
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NEWPORT 优铂特 GE50A013204SMV020 GE50A Viton Sealed 10-50,000 sccm Mass Flow Controllers
Mass Flow Controller, 20,000 sccm, 0.25 in. Swagelok-style,0-5 VDC, DB15, Viton Seal
The G-Series GE50A013204SMV020 digitally-controlled mass flow controller utilizes the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. It has a Full Scale Flow Range of 20,000 sccm and a control range of 400 to 20,000 sccm, a 15-pin D-subminature connector with tied grounds, and a 0-5 VDC flow input/output signal.
参数
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类型Mass Flow Controller
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校准气体N2 (or equivalent)
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满量程流量范围20000 sccm
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最大入口压力150 psig
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正常工作压差150 psig
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验证压力1000 psig
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爆破压力1500 psig
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配件类型0.25 in. Swagelok-style
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控制范围400 - 20000 sccm
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流量输入输出信号0 - 5 VDC
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连接器类型15-pin D-sub (tied grounds)
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典型精度±1% of set point for 20 to 100% Full Scale, ±0.2% of Full Scale for 2 to 20% Full Scale
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重复精度±0.3% of Reading
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分辨率0.1% of Full Scale
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零温度系数<0.05% of Full Scale/°C
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跨度温度系数<0.08% of Reading/°C
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入口压力系数<0.02% of Reading/psi
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典型稳定时间<750 msec, typical above 5% Full Scale
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预热时间30 minutes
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工作温度范围10 - 50°C
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存储湿度0 to 95% Relative Humidity, non-condensing
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存储温度范围-20 to 80°C
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外部泄漏完整性<1 x 10-09 (scc/sec He)
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通过关闭阀门泄漏完整性Up to 10K valve <0.1% of FS at 40 psig to atmosphere, 20K - 50K valve <1.0% of FS at 40 psig to atmosphere
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润湿材料316L S.S. VAR, 316 S.S., Elgiloy®, Nickel
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密封材料Viton
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表面光洁度16µ inch average Ra
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CE 认证Yes
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