NEWPORT 优铂特 GE50A013103SMV020   GE50A Viton Sealed 10-50,000 sccm Mass Flow Controllers     Mass Flow Controller, 1000 sccm, 0.25 in. Swagelok-style, 0-5 VDC, DB15, Viton Seal       概览   The G-Series GE50A013103SMV020 digitally-controlled mass flow controller utilizes the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. It has a Full Scale Flow Range of 100 sccm and a control range of 2 to 1000 sccm, a 15-pin D-subminature connector with tied grounds, and a 0-5 VDC flow input/output signal.         技术参数 类型 Mass Flow Controller   校准气体 N2 (or equivalent)   满量程流量范围 1000 sccm   最大入口压力 150 psig   正常工作压差 10 to 40 psid   验证压力 1000 psig   爆破压力 1500 psi...